Sputtering by Particle Bombardment

Sputtering by Particle Bombardment

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This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.119, 590 (1942) 34 [12] H. G. Scott: J. Appl. Phys. 33, 2011 (1962) 34 [13] G. K. Wehner, ... 93, 5816 (2003) 35, 43, 46, 53, 73, 100 [19] H. P. Summers: Atomic Data and Analysis Structure - User Manual, Rep. JET-IR(94) (JET Joint Undertaking, anbsp;...

Title:Sputtering by Particle Bombardment
Author:Rainer Behrisch, Wolfgang Eckstein
Publisher:Springer Science & Business Media - 2007-07-26


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