Semiconductor Manufacturing Handbook

Semiconductor Manufacturing Handbook

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This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.On earth we typically create a vacuum by connecting a pump capable of moving gas to a relatively leak-free vessel. ... 1930s and today, including the development of the turbomolecular pump, the ion pump, and the partial-pressure analyzer.

Title:Semiconductor Manufacturing Handbook
Author:Hwaiyu Geng
Publisher:McGraw Hill Professional - 2005-04-27


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