Semiconductor Characterization

Semiconductor Characterization

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This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing.Automotive Industry Action Group (AIAG), Measurement Systems Analysis Reference Manual, ASQC, 1990, pp. 38- 46, 65-70, John, P. M., ... Montgomery, D. C, Design of Experiments, Wiley, 3rd Edition, 1991, pp. 439-450. Beyer, W. H., CRCanbsp;...

Title:Semiconductor Characterization
Author:W. Murray Bullis, David G. Seiler, Alain C. Diebold
Publisher:Amer Inst of Physics - 1996


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