In addition to developing a PID tuning method, various MIMO control structures were evaluated for improving reactor ... to center, side, front, and rear thermocouples one at a time under the aquot;REMOTE and aquot;MANUAL mode of Foxboro controller.
|Title||:||Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing|
|Author||:||M. Meyyappan, Demetre John Economou|
|Publisher||:||The Electrochemical Society - 1997-01-01|