Optical Microlithography

Optical Microlithography

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EXPERIMENTAL SETUP The experiments were carried out on an ASML 1 1 50i alpha-immersion scanner clustered with a TEL Lithius track. All of the resist stack coating materials: BARC; photoresist; and topcoat; were installed in the TELanbsp;...

Title:Optical Microlithography
Author:Donis G. Flagello, SEMATECH, Inc
Publisher: - 2007


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