PROCESS DESCRIPTION In localized electrochemical deposition setup, illustrated by the block diagram in Fig. ... The applied potential results in a faradic current, ;e, to flow through the electrolyte between the electrode and substrate.
|Title||:||Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV|
|Publisher||:||The Electrochemical Society - 2005|