... shows a spring structure that exhibits the required dimensions etched with a Plasma Therm DRIE etcher and utilizes the so-called aquot;Boschaquot; process. ... A top layer of coils is deposited above the Permalloy with corresponding insulating layers. ... A uniform coating of photoresist is required to pattern the top layer of coil wires.
|Title||:||Magnetic Materials, Processes, and Devices V|
|Author||:||Lubomyr Taras Romankiw, S. Krongelb, Chong Hyuk Ahn|
|Publisher||:||The Electrochemical Society - 1999|