Masters can be repaired via techniques described in Ref. 5. Submaster Manual inspection required for critical dimensions. Automatic inspection finds chrome spots, pinholes, inclusions, exclusions, and substrate defects. Submasters can be anbsp;...
|Title||:||Kodak Microelectronics Seminar proceedings, interface '77, October 5-7, 1977, Monterey, California|
|Publisher||:||Graphics Markets Division Eastman Kodak Co. - 1978-01-01|