Handbook of Optical Metrology

Handbook of Optical Metrology

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The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.G. E. Moore, Electronics 38(8) April 19, 1965; http://download.intel.com/museum/ Moores_Law/ Article-Press_Release/Gordon_Moore_1965_Article.pdf B. Wang and P. M. Troccolo, Proc. SPIE 3873, 544 ... E. Hecht and A. Zajac, Optics, p. 251 anbsp;...

Title:Handbook of Optical Metrology
Author:Toru Yoshizawa
Publisher:CRC Press - 2009-02-25


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