Fundamentals of Microfabrication

Fundamentals of Microfabrication

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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapterThe novel types of atmospheric field ionization sources described in Example 9.3 are based on operating in a regime ... ink-jet print heads ($4.4 billion market in 1996), cardiac pacemakers, lab-on-chip for in vitro diagnostics, hearing aids, ... The Kittyhawk, introduced by HP in 1992, never caught on and seems to have been introduced before its time (Sony has continued its efforts on a similar minidisc).

Title:Fundamentals of Microfabrication
Author:Marc J. Madou
Publisher:CRC Press - 2002-03-13


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